| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of any dry failure by preventing the dew formation of isopropyl alcohol. SOLUTION: At least while inert gas containing isopropyl alcohol is supplied from a nozzle 35 to a chamber 11, heating is carried out by a tank temperature adjustment jacket 49 and a chamber temperature adjustment jacket 51 under the control of a control unit 77. Therefore, it is possible to prevent the dew formation of isopropyl alcohol supplied to the chamber 11 on the chamber 11 or a processing tank 1. As a result, it is possible to prevent the reduction in isopropyl alcohol density in the chamber 11, and to prevent the occurrence of the dry failure of a substrate W. COPYRIGHT: (C)2007,JPO&INPIT
|
