| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition method, by which the adhesiveness between a vapor deposition mask and a substrate can be improved when the vapor deposition mask is mounted on the substrate and vapor deposition can be performed with a good precision without infiltration of a vapor deposition material. SOLUTION: The vapor deposition mask 1 having a pattern forming area 4 where through holes 5 for vapor deposition are formed is mounted on one side of the substrate 30, at least the end part of the vapor deposition mask 1 is held, and a weight 20 is provided on the side opposite to the side where the vapor deposition mask 1 is mounted of the substrate 30 via pressing tool 50. Thereby, the adhesiveness between the vapor deposition mask 1 and the substrate 30 can be improved, and vapor deposition can be performed with a good precision. COPYRIGHT: (C)2007,JPO&INPIT
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