| 摘要 |
The present invention is a substrate transfer apparatus including a transfer arm for transferring a substrate and a mounting portion for receiving the substrate transferred by the transfer arm from the transfer arm, including: a mounting portion detector provided at the transfer arm for detecting the mounting portion; a moving means for raising and lowering and moving in a horizontal direction the transfer arm; and a controller for controlling the moving means based on a detection signal from the mounting portion detector. When the substrate transferred by the transfer arm is delivered to a spin chuck, the mounting portion detector detects the mounting portion of the spin chuck, and then the moving means is driven based on a control signal from the controller to lower the transfer arm in an oblique direction to thereby mount the substrate on the mounting portion. Accordingly, it is possible to perform stable transfer and delivery of the substrate to the mounting portion at a high speed and with a high accuracy
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