发明名称 Y-SHAPED CARBON NANOTUBES AS AFM PROBE FOR ANALYZING SUBSTRATES WITH ANGLED TOPOGRAPHY
摘要 A Y-shaped carbon nanotube atomic force microscope probe tip and methods comprise a shaft portion; a pair of angled arms extending from a same end of the shaft portion, wherein the shaft portion and the pair of angled arms comprise a chemically modified carbon nanotube, and wherein the chemically modified carbon nanotube is modified with any of an amine, carboxyl, fluorine, and metallic component. Preferably, each of the pair of angled arms comprises a length of at least 200 nm and a diameter between 10 and 200 nm. Moreover, the chemically modified carbon nanotube is preferably adapted to allow differentiation between substrate materials to be probed. Additionally, the chemically modified carbon nanotube is preferably adapted to allow fluorine gas to flow through the chemically modified carbon nanotube onto a substrate to be characterized. Furthermore, the chemically modified carbon nanotube is preferably adapted to chemically react with a substrate surface to be characterized.
申请公布号 US2007125946(A1) 申请公布日期 2007.06.07
申请号 US20050164792 申请日期 2005.12.06
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BOYE CAROL A.;FURUKAWA TOSHIHARU;HAKEY MARK C.;HOLMES STEVEN J.;HORAK DAVID V.;KOBURGER CHARLES W.III
分类号 G21K7/00;G01Q10/00;G01Q60/24;G01Q60/38;G01Q60/42;G01Q70/12;G01Q70/16 主分类号 G21K7/00
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