| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of reducing transparent capacitance, without increasing a drive voltage applied to a vibrator by independently selecting the distance between the vibrator and each electrode. SOLUTION: The static capacitance resonator 1 provided with a vibrator 21, both ends of which are supported above a substrate 10 via a space 31 on the substrate 10 includes a first electrode 41 formed on the substrate 10 via a part of the space 31 under the vibrator 21, and a second electrode 51 juxtaposed with the first electrode 41 and formed on the substrate 10 via part of the space 31 under the vibrator 21, the electrode, serving as a signal line is separated from the electrode, serving as a DC line, and the distance d1 between the first electrode 41 and the vibrator 21 differs from the distance d2 between the second electrode 51 and the vibrator 21. COPYRIGHT: (C)2007,JPO&INPIT
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