ELECTROSTATIC ACTUATOR, DROPLET DISCHARGING HEAD, DROPLET DISCHARGING APPARATUS, ELECTROSTATIC DEVICE, METHOD FOR MANUFACTURING ELECTROSTATIC ACTUATOR AND MANUFACTURING METHOD OF DROPLET DISCHARGING HEAD

摘要

PROBLEM TO BE SOLVED: To obtain an electrostatic actuator which enables a stable drive by reducing the effect of a residual charge between an oscillating board and an opposite electrode. SOLUTION: The electrostatic actuator is equipped with the oscillating board 12 with a flexibility for acting as one electrode and the opposite electrode 17 which is opposed to the oscillating board 12 through a gap 10 with a voltage being applied between the opposite electrode 17 and the oscillating board 12. In the electrostatic actuator, an insulating film 16B is formed in the opposite surface facing to the opposite electrode 17 of the oscillating board 12, and a surface layer 16C composed of carbon materials such as a diamond-like carbon and the like is formed on at least one surface of the opposite surfaces of the oscillating board 12 where the insulating film 16B has been formed and the opposite electrode 17. COPYRIGHT: (C)2007,JPO&INPIT