APPARATUS FOR APPLYING SOLUTION AND METHOD FOR MEASURING AMOUNT OF SOLUTION TO BE SUPPLIED

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for applying a solution, in which the precision when the amount of the solution to be supplied from a nozzle is measured can be improved and the efficiency when the measuring work is done can also be improved. SOLUTION: The apparatus for applying the solution onto a substrate is provided with: a plurality of application heads 22 which are arranged along the predetermined direction and each of which has the nozzle for applying the solution onto the substrate; a placing table 7 on the upper surface of which the substrate is placed; a first linear motor 8 for relatively moving the placing table and the plurality of application heads to the direction crossing the predetermined direction; a scale 41 for measuring the weight of the solution to be supplied from the plurality of application heads; and a second linear motor 44 for moving the scale independently of the placing table to the predetermined direction or the direction crossing the predetermined direction. COPYRIGHT: (C)2007,JPO&INPIT