发明名称 |
Liquid metal capacitively monitored sensors |
摘要 |
Capacitive sensors using liquid metals can be fabricated using MEMS device design and fabrication techniques. Movement of the liquid metal in response to a stimulus can provide measurable changes in capacitance of the devices.
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申请公布号 |
US2007125178(A1) |
申请公布日期 |
2007.06.07 |
申请号 |
US20050297019 |
申请日期 |
2005.12.07 |
申请人 |
ROSENAU STEVEN A;BEERLING TIMOTHY;FRANK MICHAEL L |
发明人 |
ROSENAU STEVEN A.;BEERLING TIMOTHY;FRANK MICHAEL L. |
分类号 |
G01L9/12 |
主分类号 |
G01L9/12 |
代理机构 |
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地址 |
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