| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel high-frequency detection circuit which reduces error even in a low power region. <P>SOLUTION: The high-frequency detection circuit detects the high-frequency output power of a high frequency generator and turns the high-frequency output power into a direct current, comprising a square circuit 2 for squaring the high-frequency output power detection circuit, wherein a filter 3 is connected to the output of the square circuit, and the squared high-frequency detection signal is turned into a direct current by the filter. <P>COPYRIGHT: (C)2007,JPO&INPIT |
