| 摘要 |
PROBLEM TO BE SOLVED: To provide a helium separating material excellent in heat resistance, helium permeability and selectivity, and to provide a method of producing the same. SOLUTION: The helium separating material 1 comprises a substrate 11 having a communicating hole and composed of an inorganic material, an amorphous material-containing membrane 12 which coats with a surface layer of the substrate 11 and which includes an amorphous material, and a crystalline material-containing membrane 13 which is disposed on the surface of the amorphous material-containing membrane 12 inscribed in an inside of the communicating hole of the surface layer and which includes a crystalline material, and has fine pores 14 (0.261 to 0.288 nm of an average diameter) surrounded by the crystalline material-containing membrane. COPYRIGHT: (C)2007,JPO&INPIT
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