发明名称 Forming a thin film thermoelectric cooler and structures formed thereby
摘要 Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a first plurality of openings through a first surface of a substrate, forming a p-type TFTEC material within the first plurality of openings, forming a second plurality of openings substantially adjacent to the first plurality of openings through the first surface of the substrate, and then forming an n-type TFTEC material within the second plurality of openings.
申请公布号 US2007128773(A1) 申请公布日期 2007.06.07
申请号 US20050296959 申请日期 2005.12.07
申请人 INTEL CORPORATION 发明人 BASKARAN RAJASHREE
分类号 H01L21/84;H01L21/00 主分类号 H01L21/84
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