发明名称 Flash memory device and method for fabricating the same
摘要 A flash memory device and a method for fabricating the same are provided. The method includes: preparing a semi-finished substrate where floating gates and an isolation layer isolating the floating gates are formed; recessing a predetermined portion of the isolation layer to make the floating gates protrude; etching another predetermined portion of the isolation layer to form a trench therein; forming a dielectric layer over the isolation layer and the floating gates; and forming a control gate over the dielectric layer such that the control gate fills the trench.
申请公布号 US2007128797(A1) 申请公布日期 2007.06.07
申请号 US20060475632 申请日期 2006.06.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHO JUNG-II
分类号 H01L21/336;H01L29/76 主分类号 H01L21/336
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