APPARATUS AND METHOD FOR PROVIDING CHEMICAL LIQUID

摘要

A chemical liquid supply apparatus and a method for supplying a chemical liquid using the same are provided to minutely control the chemical liquid supplied from a mixing tank by decreasing a cross sectional area of a lower end of the mixing tank relative to an upper end thereof. A chemical liquid supply unit(100) supplies a chemical liquid from a chemical liquid supply source(110) via a chemical liquid supply line(120) to a mixing tank(300). The chemical liquid supply unit has a chemical liquid supply valve(130) for adjusting a flow rate of the chemical liquid. A diluent supply unit(220) supplies a diluent from a diluent supply source(210) via a diluent supply line to the mixing tank. The diluent supply unit has a diluent supply valve(230) for adjusting a flow rate of the diluent. A lower end of the mixing tank has a cross sectional area smaller than that of an upper end thereof.