| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid producing apparatus capable of simply and easily producing active species and a liquid containing the same using a compact device, and also provide a processing apparatus and a surface machining apparatus using the liquid produced by the liquid producing apparatus. SOLUTION: The liquid producing apparatus is a functional water producing apparatus 11 for producing functional water, which is a liquid containing the active species, comprises a high-pressure pump 13 for supplying cleaned water and a nozzle 12 for discharging the cleaned water supplied by the high-pressure pump 13 to produce the active species. The discharge opening of the nozzle 12 and discharging rate of the flow are so designed that the time from the functional water discharge from the nozzle 12 to the discharged functional water forming a droplet becomes shorter than the time from the functional water discharge from the nozzle 12 to the active species dissipation. COPYRIGHT: (C)2007,JPO&INPIT
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