| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology capable of rapidly, safely and effectively purging out chemical substances remaining in a dead-end portion, and smoothly replacing a fluid storage tank. <P>SOLUTION: A piping device comprises a fluid storage tank 21 with a pipe having a valve 23 on a base part side from a joint part 24 on a tip end part, a fluid consumption line 51, a cleaning fluid feed line 61, and a cleaning fluid collection line 41, and has an inner pipe 33 and an outer pipe 31 provided to the outer side of the inner pipe 33. A joint part to be joined with a joint part 24 provided to the fluid storage tank 21 is provided to one end side of the outer pipe 31. One end side of the inner pipe 33 is protruded from the joint part provided to one end side of the outer pipe 31. When the joint parts are joined with each other, the one end side can be advanced in the pipe 71 provided to the fluid storage tank 21. The other end side of the outer pipe 31 connected to the cleaning fluid collection line 41, and the other end side of the inner pipe 33 can be connected to the fluid consumption line 51 and the cleaning fluid feed line 61. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
