发明名称 ACTIVE MATRIX SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide an active matrix substrate which can be manufactured with high reliability and high yield by suppressing the occurrence of poor disconnection or the occurrence of poor connection when mounted. SOLUTION: With respect to an active matrix substrate 100, at least a pixel display area 27 wherein a first metallic film forming a gate electrode 2a, a first inter-layer insulating film 4 covering the gate electrode 2a, a semiconductor film 5, a second metallic film forming a source electrode 8, a drain electrode 9, and source wiring 7 for supplying a display signal to the source electrode 8, a second inter-layer insulating film 11, and a pixel electrode 13 connected to the source electrode 8 through a contact hole 12 formed in the second inter-layer insulating film 11 are formed in layers is provided on an insulating substrate 1. Furthermore, source drawing out wiring 18 for drawing out source wiring 7 from the pixel display area 27 for the purpose of display signal input is provided and is formed in the same later as the first metallic film forming the gate electrode 2a. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007139867(A) 申请公布日期 2007.06.07
申请号 JP20050330068 申请日期 2005.11.15
申请人 MITSUBISHI ELECTRIC CORP 发明人 ARAKI TOSHIO
分类号 G02F1/1345;G02F1/1343;H01L21/3205;H01L23/52;H01L29/786 主分类号 G02F1/1345
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