| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection tool and an inspection probe used for inspecting the electric characteristic of a substrate to be inspected. SOLUTION: The substrate inspection tool 1 comprises the inspection probe 2 whose first end 23 is brought into conductive contact with an inspection position 101 of the substrate 100 to be inspected, a connection electrode body 4 having an electrode part 41 to be in conductive contact with the second end 24 of the inspection probe 2, and a holding body 3 for holding the inspection probe 2. The holding body 3 has the first guide part 31 where the first guide hole 311 for guiding the first end 23 to the inspection position 101 is formed, and the second guide part 32 where the second guide hole 321 for guiding the second end 24 to the electrode part 41 is formed. The inspection probe 2 has the first end 23 and the second end 24, and comprises a linear flexible conductor part 21 and an insulation part 22 insulation-coated on the periphery of a conductor part 21 excluding the first end 23 and the second end 24, and the length of the second end 24 is formed shorter than the length of the second guide hole 321. COPYRIGHT: (C)2007,JPO&INPIT
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