发明名称 Carbon nanotube reinforced metallic layer
摘要 A method and apparatus including an interconnect structure having a surface, a plurality of nanotubes disposed adjacent to the surface, and a metallic layer disposed adjacent to the surface and substantially including the nanotubes. An assembly may include a first embodiment of an apparatus as described, and may further include a second such embodiment at least one of physically and electrically coupled to the first embodiment.
申请公布号 US2007128883(A1) 申请公布日期 2007.06.07
申请号 US20050292690 申请日期 2005.12.02
申请人 INTEL CORPORATION 发明人 HWANG CHI-WON
分类号 H01L21/31 主分类号 H01L21/31
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