| 摘要 |
In a system for controlling a semiconductor device manufacturing process, a recipe indicating a control condition for controlling processing in a semiconductor manufacturing apparatus is calculated by a computation performed using manufacturing data obtained in the semiconductor device manufacturing process and a predetermined algorithm, and when the recipe cannot be derived, an alternative recipe prepared beforehand is transmitted to a manufacturing management system for managing the semiconductor manufacturing apparatus. The alternative recipe may be derived using the predetermined algorithm by a recomputation in which input conditions are changed. When a recipe cannot be derived by the recomputation, a planned recipe with which semiconductor devices processed by the manufacturing process fall within specification values may be used as the alternative recipe.
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