发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 A manufacturing method of a highly reliable semiconductor with a waterproof property. The method includes the steps of: sequentially forming a peeling layer, an inorganic insulating layer, and an element formation layer including an organic compound layer, over a substrate; separating the peeling layer and the inorganic insulating layer from each other, or separating the substrate and the inorganic insulating layer from each other; removing a part of the inorganic insulating layer or a part of the inorganic insulating layer and the element formation layer, thereby isolating at least the inorganic insulating layer into a plurality of sections so that at least two layers among the organic compound layer, a flexible substrate, and an adhesive agent are stacked at outer edges of the isolated inorganic insulating layers; and cutting a region where at least two layers among the organic compound layer, the flexible substrate, and the adhesive agent are stacked.
申请公布号 US2007128774(A1) 申请公布日期 2007.06.07
申请号 US20060563939 申请日期 2006.11.28
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMADA DAIKI
分类号 H01L21/84 主分类号 H01L21/84
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