发明名称 MASK STORAGE CONTAINER AND ALIGNER
摘要 <P>PROBLEM TO BE SOLVED: To provide a mask storage apparatus, or the like capable of firmly mounting the upper and lower lids in the mask storage apparatus. <P>SOLUTION: A mask storage container 2 comprises a base member 2b for placing a mask 1, and a lid member 2a for covering the mask 1. The mask storage container 2 moves between an atmospheric environment and a vacuum environment, and has an energizing member 5 for energizing the junction between the base member 2b and the lid member 2a. The energizing member 5 has energizing force that is larger than the weight of the base member 2b and the mask 1. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007141925(A) 申请公布日期 2007.06.07
申请号 JP20050329880 申请日期 2005.11.15
申请人 NIKON CORP 发明人 OKUBO YUKIHARU;KAKIZAKI YUKIO;ISHIMA SUKIHIRO;KAWAMATA HIROYUKI
分类号 H01L21/027;G03F1/24;G03F1/66;H01L21/673 主分类号 H01L21/027
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