| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of conveying and attaching mask for exposure device capable of drastically improving the attaching precision of a mask upon mask attachment and the reproducibility of flatness of the mask. <P>SOLUTION: The method of conveying and attaching mask of exposure device comprises: a step of conveying a holder 70 which is disposed so as to mount the mask M in parallel to a chuck part 16 of a mask stage 1, to an under side position of the chuck part 16; a step of moving the holder 70 on which the mask M is mounted, closely to an under surface of the chuck part 16; and a step of separating the mask M from the holder 70 and attaching the same to the chuck part 16. The holder 70 holds the mask M by only the back surface part corresponding to parts contacting with the chuck part 16 when the mask M is attached to the chuck part 16. <P>COPYRIGHT: (C)2007,JPO&INPIT |
