摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electronic part having a capacitor in which it is possible to prevent an electromigration from occurring and the accuracy of a capacity value of a capacitor element is high. <P>SOLUTION: The electronic part 1 has a lower conductor 21 formed on a substrate 51; a dielectric film 31 formed so as to cover the lower conductor 21; an organic insulating film 33 formed on the dielectric film 31; and an upper conductor 23 which is formed in an opening 33b formed by opening the organic insulating film 33 on the lower conductor 21, and in which the lower conductor 21 and the dielectric film 31 constitute a capacitor element 11. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |