| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive chuck device for a work with a simple structure provided with a rational design structure easily coping with works with various diameters. SOLUTION: A sucking pad 5 is fitted to a circular table face 3a of a chuck table 3 in the middle of which a suction hole 8 leading to a vacuum source is provided via a support plate 4 whose size is equal to or more than the size of the table face 3a. A middle of the support plate 4 is formed with a relay hole 9 leading to the suction hole 8. The sucking pad 5 is formed concentrically with a plurality of annular suction grooves surrounding the relay hole 9, and formed radially with communicatively connecting grooves to communicatively communicate the sucking holes with the relay hole. COPYRIGHT: (C)2007,JPO&INPIT |
