| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for recycling an etching liquid by which heavy metals, aluminum hydroxide or the like in an etching liquid are removed without being subjected to physical treatment, and the etching liquid can be recycled without changing its composition. SOLUTION: The recycling device is composed of: an etching liquid tank 1 storing a high alkaline solution W for subjecting heavy metals, aluminum or the like to etching treatment; at least one or more precipitators 3 connected to the etching liquid tank 1 via piping 2; a neutralization treatment stage 5 for precipitates G and a precipitate removal stage 8 connected to the lower layer part 3a of the precipitator(s) 3 via a waste water piping 4; a disposal stage 7 for precipitates G and a waste liquid discharging stage 8; and a circulation treatment stage 10 of returning a supernatant etching liquid Wx from the upper layer part 3b of the precipitator(s) 3 to the etching liquid tank 1 via circulation piping 9. Circulation piping 11 of connecting the circulation treatment stage 10 for the supernatant etching liquid Wx and the etching liquid tank 1 is connected with an etching liquid feed stage 12 of replenishing a new etching liquid. COPYRIGHT: (C)2007,JPO&INPIT
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