Multibeam type scanning microscope

摘要

A multibeam type scanning microscope that has N beams, wherein the system is devised so that the respective beams perform scanning in L^M stages in the Y direction at maximum magnification where the discrete scanning direction is the Y direction, thus performing scanning in an area of NxL^M stages overall, and scanning is controlled so that the following processes (1) and (2) are successively repeated L^K times at a magnification that is 1/L^K times the maximum magnification. Here, L, M and N are integers of 2 or greater, and K is a natural number. (1) The respective beams perform scanning in the Y direction at a sampling interval that is L^K times that at the maximum magnification. (2) When scanning of L^M-K stages is completed in the Y direction, and the repetition is less than the L^Kth time, the scanning skips ((N-1)xL^M-K+1) stages.