发明名称 PHASE SEPARATION IN PATTERNED STRUCTURES
摘要 Novel phase-separation behavior by a mixture, including binary mixture, of patterning compounds, including alkanethiols, when deposited onto a surface, including a gold surface, using micro and nano-deposition tools such as tip and stamp methods like micro-contact printing (µCP), and Dip-Pen Nanolithography (DPN). This behavior is significantly different than that observed in the bulk. This behavior was demonstrated using three examples of compounds: 16-mercaptohexadecanoic acid (MHA), 1-octadecanethiol (ODT), and CF<SUB>3</SUB>(CF<SUB>2</SUB>)<SUB>11</SUB>(CH<SUB>2</SUB>)<SUB>2</SUB>SH (PFT). The identity of the resulting segregated structure was confirmed by lateral force microscopy (LFM), and by selective metal-organic coordination chemistry. This phenomenon is exploited to print sub- 100 nm wide alkanethiol features via conventional µCP and to form sub- 15 nm features using DPN printing, which is below the ultimate resolution of both these techniques. These nano-patterned materials also can serve as templates for constructing more complex architectures.
申请公布号 WO2007008507(A3) 申请公布日期 2007.06.07
申请号 WO2006US26082 申请日期 2006.07.05
申请人 MIRKIN, CHAD, A.;SALAITA, KHALID 发明人 MIRKIN, CHAD, A.;SALAITA, KHALID
分类号 G03F7/00 主分类号 G03F7/00
代理机构 代理人
主权项
地址