| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable shape mirror apparatus in which wavefront aberration is accurately corrected. <P>SOLUTION: In the variable shape mirror apparatus 1, piezoelectric members 5 and 6 are expanded and contracted by applying a driving voltage on driving electrodes 7 and 8, and a mirror base member 2 and a mirror face 3 are deformed. A common electrode 4, the piezoelectric member 6 and the driving electrode 8 have upper and lower faces of which the area is larger than the area of a radiated part 11 of a light beam on the mirror face 3 when the mirror base member 2 and the mirror face 3 are not deformed, so that the radiated part 11 stays within the region of the respective upper and lower faces of the common electrode 4, the piezoelectric member 6 and the driving electrode 8. <P>COPYRIGHT: (C)2007,JPO&INPIT |
