| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve measurement accuracy without having to complicate the structure of a flow sensor. <P>SOLUTION: A heater 4 is controlled in such a way as to be intermittently driven over a measurement period of a fluid. Output of side temperature sensors 11 and 13 is captured as side temperature signals when not driven every time the drive of the heater 4 is halted during the measurement period. Then output of the side temperature sensors 11 and 13 according to the drive of the heater 4 is captured as side temperature signals when driven corresponding to the side temperature signals when not driven. Upstream-side temperature signals outputted by an upstream-side temperature sensor 8 and downstream-side temperature signals outputted by a downstream-side temperature sensor 5 correspondingly to the side temperature signals when driven are captured. On the basis of the side temperature signals when not driven and the side temperature signals when driven, information on the state of physical properties of a fluid is detected. On the basis of the information on the state of physical properties, the upstream-side temperature signals and the downstream-side temperature signals are corrected. On the basis of the corrected upstream-side temperature signals and the corrected downstream-side temperature signals, a temperature distribution which has changed according to the flow velocity of the fluid is detected to compute the quantity of flow of the fluid. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
