POLARIZATION MODULATION TYPE IMAGING ELLIPSOMETER

摘要

PROBLEM TO BE SOLVED: To provide a polarization modulation type imaging ellipsometer capable of finding precisely and quickly a polarization analytical parameter in each point on a sample surface. SOLUTION: This polarization modulation type imaging ellipsometer is provided with: a light source part for emitting a light with intensity varied time-serially at a prescribed frequency; a collimator; a polarizer; an incident optical part having a photoelastic phase modulator for modulating the light from the light source part, and for changing a phase difference between p-polarization and s-polarization sine-functionally to irradiate a sample; an analyzer for detecting a polarization state of the light reflected or transmitted by/through the sample; an emission optical part having a two-dimensional detector for converting the light from the analyzer into an electric signal; and a control/analytical part for controlling the light source part and the photoelastic phase modulator to be operated at the same frequency; wherein the light source part generates a measuring light having a prescribed time lag with respect to an operation clock of the photoelastic phase modulator, and the control/analytical part calculates the polarization analytical parameter in the each point, using an output signal from the two-dimensional detector and a calibration value found preliminarily using a standard sample. COPYRIGHT: (C)2007,JPO&INPIT