| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive pressure sensor capable of exhibiting stable device characteristics and accurately detecting pressure. SOLUTION: First and second electrically conductive members 12 and 13 are embedded in a glass substrate 11. In a principal plane 11b of the glass substrate 11, a lead-out electrode 14a is formed in such a way as to electrically connect to the first electrically conductive member 12, and a lead-out electrode 14b is formed in such a way as to electrically connect to the second electrically conductive member 13. A fixed electrode 15 is formed in the first electrically conductive member 12 exposed on the side of a principal plane 11a of the glass substrate 11. A silicon substrate 17 having a pressure-sensitive diaphragm 17a as a movable electrode of a pressure sensor is eutectically and anodically bonded to the principal plane 11a of the glass substrate 11 via a bonding member 16. COPYRIGHT: (C)2007,JPO&INPIT
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