| 摘要 |
A probe card transfer assist apparatus for assisting an operation of transferring a probe card employed in an electrical inspection apparatus includes a holding unit for holding a pair of grips of the probe card wherein the grips are supported by being placed onto or suspended by the holding unit; a supporting unit for movably supporting the holding unit; and an elevation mechanism for moving the supporting unit up and down. Further, an inspecting equipment is provided with the probe card transfer assist apparatus having a holding unit for holding a pair of grips of the probe card wherein the grips are supported by being placed onto or suspended by the holding unit; a supporting unit for movably supporting the holding unit; and an elevation mechanism for moving the supporting unit up and down.
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