MICRO LENS ARRAY AND ITS MANUFACTURING METHOD

摘要

Pluralities of lens parts 20, 22 are formed on a lens substrate 16 by dry-etching. The lens parts 20 and 22 have same structures, and the lens part 20 includes toroidal lens surfaces S 1 and S 2 opposing to each other on one principal surface and another principal surface of the substrate 16 . Assuming that a cross section in a y-axis direction of a laser beam emitted from a laser active layer in a z-axis direction is long and narrow in an x-axis direction, the lens surface S 2 is formed to have a radius of curvature R₂₁ in the x-axis direction smaller than a radius of curvature R₂₂ in the y-axis direction, and the lens surface S 1 is formed to have a radius of curvature R₁₁ in the x-axis direction smaller than a radius of curvature R₁₂ in the y-axis direction.