发明名称 Apparatus and method of fabricating a MOSFET transistor having a self-aligned implant
摘要 A method including introducing an implant of a dopant species into an active region of a device substrate, the dopant species comprising a conductivity type such that a conductivity of the implant is the same as a conductivity of a well of the active region wherein the introduction is aligned to junction regions of a device structure. An apparatus and system comprising an active device region of a substrate, the active device region comprising a well of a first conductivity, junction regions of a different second conductivity formed in the active region and separated by a channel and an implant of a dopant species in the well, the dopant species comprising a conductivity type such that a conductivity of the implant is the same as the first conductivity of the well and the implant is aligned to the junction regions.
申请公布号 US2007128820(A1) 申请公布日期 2007.06.07
申请号 US20050294730 申请日期 2005.12.05
申请人 INTEL CORPORATION 发明人 MAJUMDAR AMLAN;DATTA SUMAN;BRASK JUSTIN K.;CHAU ROBERT S.;KAVALIEROS JACK T.
分类号 H01L21/331 主分类号 H01L21/331
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