| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectricity resonator which includes a favorable frequency characteristic, suppressing a vibration leak of a vibrating portion from a supporting section. <P>SOLUTION: An upper electrode 103 is formed on one side principal plane of a piezoelectric material layer 101 and a lower electrode 102 is formed on the other side principal plane. A vibrating component 104 is a region in which a lower electrode 102, a piezoelectric material layer 101, and the upper electrode 103 are overlapped in the vertical projection direction. Moreover, a wiring electrode 108 for connecting the lower electrode 102 and the upper electrode 103 to an input/output electrode 107 is prepared on one side principal plane and the other side principal plane of the piezoelectric material layer 101, respectively. The vibration component 104 is laid (connected) on a substrate 105 through a supporting section 109. The supporting section 109 is formed on a position of the piezoelectric material layer 101 excluding a region which forms the vibration component 104, and a region in which the input/output electrode 107 and the wiring electrode 108 are formed. Namely, the supporting section 109 is prepared on a position in which any of the electrode is not overlapped with each other in the vertical projection direction. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
