| 摘要 |
PROBLEM TO BE SOLVED: To provide: an electrooptical apparatus such that the capacity value of a holding capacity per unit area can be increased while varying neither electric characteristics nor reliability of a thin film transistor; electronic equipment apparatus with the electrooptical apparatus; and a method for manufacturing the electrooptical apparatus. SOLUTION: In a liquid crystal device 1, a dielectric layer 5 of the holding capacity 1h has a first dielectric layer 5a formed selectively in a region two-dimensionally overlapping with a small-film-thickness region 4c of a gate insulating layer 4 on the top surface of a lower electrode 3c and a second dielectric layer 5b comprising the small-film-thickness region 4c of the gate insulating layer 4. The first dielectric layer 5a has a larger dielectric constant than the second dielectric layer 5b. Consequently, the capacity value of the holding capacity 1h per unit area can be increased. The gate insulating film 4 comprises silicon nitride films 4a and 4b, so neither electric characteristic nor reliability varies in the thin film transistor 1c. COPYRIGHT: (C)2007,JPO&INPIT |
