| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a single crystal capable of suppressing the fluctuation of the manufacturing conditions and reducing unevenness of the quality in the crystal. SOLUTION: The temperature at a deposition part is controlled to keep the mass decrement of a raw material 11 in a crucible 3 constant in monitoring the mass decrement of the raw material 11 in the crucible 3 by a load cell 7a. Besides, the mass increment of a single crystal grown at the underside of a lid 5 is monitored by a load cell 7b and the mass increment of the single crystal is converted to the growing rate in the direction of its thickness. Based on the conversion result, the driving speed of a motor 6 for moving the lid 5 upward is controlled to keep the distance between the surface of the single crystal (deposition surface) grown at the underside of the lid 5 and the surface of the raw material 11 to be constant. COPYRIGHT: (C)2007,JPO&INPIT
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