| 摘要 |
PROBLEM TO BE SOLVED: To economically form a homogeneous titanium oxide film on the surface of a substrate. SOLUTION: A titanium tetrachloride aqueous solution having 0.1 to 17 wt.% titanium content is applied in a film state on the surface of a substrate having acid resistance. The titanium tetrachloride aqueous solution as in a liquid film state is heated to 300°C or higher to volatilize H<SB>2</SB>O and HCl in the liquid film. COPYRIGHT: (C)2007,JPO&INPIT
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