| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display panel which is improved in reliability of display quality depending upon water. SOLUTION: A TFT substrate and a color filter substrate each have an obliquely vapor-deposited film formed in an alignment film forming stage (steps S1 and S4) and are subjected to silane processing as hydrophobicity imparting processing in a hydrophobicity imparting processing stage (steps S2 and S5). Then the respective substrates after the silane processing are placed in a water removing stage (step S8) through a cell parting stage (steps S3 and S6) and a sticking stage (step S7). In the water removing stage, water adsorbed to the top surface of the obliquely vapor-deposited film formed on each substrate is removed under an ultra-high vacuum of 9×10<SP>-9</SP>Torr in vacuum degree. Then liquid crystal is injected into cells where water is removed (step S9). COPYRIGHT: (C)2007,JPO&INPIT
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