| 摘要 |
PROBLEM TO BE SOLVED: To provide a sticking material removing method of a process gas control valve and a control device of the process gas control valve, which prevent fluid leakage while reducing particles generated by the process gas control valve by removing a sticking material stuck to a valve seat and a valve element in a short period of time. SOLUTION: The valve element 22 is made to repeatedly collide with the valve seat 6 by making purge gas flow to the process gas control valve 1 for controlling supply of process gas by allowing the valve element 22 to abut on or separate from the valve seat 6. At this time, a body 2 of the process gas control valve 1 may be heated by a heater 30. The control device 31 having a sticking material removing means 37 for performing a sticking material removing method of the process gas control valve 1, may also be connected to the process gas control valve 1. COPYRIGHT: (C)2007,JPO&INPIT
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