发明名称 METHOD AND SYSTEM FOR HERMETICALLY SEALING PACKAGES FOR OPTICS
摘要 A system for hermetically sealing devices includes a substrate, which includes a plurality of individual chips. Each of the chips includes a plurality of devices and each of the chips are arranged in a spatial manner as a first array. The system also includes a transparent member of a predetermined thickness, which includes a plurality of recessed regions arranged in a spatial manner as a second array and each of the recessed regions are bordered by a standoff region. The substrate and the transparent member are aligned in a manner to couple each of the plurality of recessed regions to a respective one of said plurality of chips. Each of the chips within one of the respective recessed regions is hermetically sealed by contacting the standoff region of the transparent member to the plurality of first street regions and second street regions using at least a bonding process to isolate each of the chips within one of the recessed regions.
申请公布号 US2007128818(A1) 申请公布日期 2007.06.07
申请号 US20070672114 申请日期 2007.02.07
申请人 MIRADIA INC. 发明人 YANG XIAO;CHEN DONGMIN
分类号 H01L21/00;H01L23/10;B32B37/00;G02B6/42;G02B26/08;H01L21/331;H01L21/50;H01L23/02;H01L23/08;H01L27/14;H01L31/0203 主分类号 H01L21/00
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