| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mold having relatively high bonding force between diamond-like carbon composite layers and a substrate. <P>SOLUTION: This invention relates to a mold having diamond-like carbon composite layers where the diamond-like carbon composite layers are composed such that a first layer through to (N+1)th layer are sequentially provided from the substrate to the outer surface, and the first layer through to Nth layer are each a diamond-like carbon layer including a filler being a metal or a metal nitride where mole percent of the filler in each layer gradually decreases toward the surface, and the (N+1)th layer consists of a pure diamond-like carbon layer. The value of N is 2-30. <P>COPYRIGHT: (C)2007,JPO&INPIT |
