| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a highly sensitive sensor for detecting mechanical deformation amount, and an acceleration sensor and a pressure sensor using the same. <P>SOLUTION: A sensor structure 1 comprises a silicon substrate, and is formed with a recess 3 having a diaphragm 2 of a thin pressure receiving part, by anisotropic-etching one part in reverse face side. A glass pedestal 4 is provided with a pressure introducing hole 5 for introducing fluid pressure in the recess 3, and is joined to a reverse face of the sensor structure 1. Carbon nanotube resistance elements 61, 62 are provided astride on a surface of the sensor structure 1 in a periphery of the diaphragm 2, in positions corresponding to the centers of peripheral edge parts in both sides of the diaphragm 2. Reference resistance elements 63, 64 are fixedly arranged on the surface of the sensor structure 1 in a periphery of the diaphragm 2 to form a bridge circuit for taking out a detection signal, together with the carbon nanotube resistance elements 61, 62. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
