HIGH FREQUENCY MICRO-MACHINE SWITCH AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric high frequency micro-machine switch in which a cantilever and a CPW wiring line can be formed on one base plate and the above cantilever drives downward. SOLUTION: The high frequency micro-machine switch is composed of a base plate 101 provided with an RG signal line 102a, 102b and a cavity 103a, a cantilever which is positioned on the cavity 103a and one end of which is fixed on the base plate 101 and a connection pad 111 for contacting the signal line and connecting with the RF signal line 102a, 102b when the cantilever 110 drives downward, and the manufacturing method of the above is provided. COPYRIGHT: (C)2007,JPO&INPIT