CARBON NANOTUBE WIRING BOARD AND METHOD OF MANUFACTURING SAME

摘要

PROBLEM TO BE SOLVED: To provide a carbon nanotube wiring board formed in a predetermined pattern with a carbon nanotube highly aligned in a predetermined direction, and to provide a method of manufacturing the same. SOLUTION: The carbon nanotube wiring board includes a substrate and a wiring pattern arranged on the substrate and composed of a carbon nanotube. The method of manufacturing the wiring board sequentially includes a step of forming a suppression film 4 (silicon oxide film or the like) for suppressing the generation of the carbon nanotube on the surface of silicon carbide 3; a step of etching the suppression film 4 in a predetermined pattern; a step of heating the silicon carbide after etching at a temperature in which the silicon carbide is broken down to a level that silicon atoms are lost from the surface of the silicon carbide, in an atmosphere containing a minute amount of oxygen. The wiring board on which the wiring pattern 2 comprising the carbon nanotube can be manufactured in accordance with the pattern. COPYRIGHT: (C)2007,JPO&INPIT