发明名称 ARRANGEMENT-CONTROLLED PATTERNED SINGLE-LAYER INSULATING PARTICULATE FILM, INSULATING PARTICULATE BUILT UP FILM, AND FORMING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a film (patterned insulating particulate built up film) where a plurality of layers of films (patterned single-layer insulating particulate film) having uniform thicknesses and only a layer of an insulating particulate are arranged at a particle size level, in which only the layer of the insulating particulate is arranged selectively on the surface of an arbitrary base material by giving a new function without losing a function that each kind of the insulating particulate has originally by using the insulating particulate, and to provide a forming method of the film. SOLUTION: The patterned single-layer insulating particulate films are subjected to covalent bond via a first organic film where a layer of an insulating particulate film selectively formed on the surface of the base material is formed selectively on the surface of the base material, and a second organic film formed on the surface of the insulating particulate. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007142004(A) 申请公布日期 2007.06.07
申请号 JP20050331240 申请日期 2005.11.16
申请人 KAGAWA UNIV;DOSHISHA 发明人 OGAWA KAZUFUMI;WATANABE YOSHIAKI
分类号 H01L21/312 主分类号 H01L21/312
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