发明名称 MECHANICAL QUANTITY DETECTING ELEMENT AND MECHANICAL QUANTITY DETECTING DEVICE
摘要 A mechanical quantity detecting element includes a main frame displaceably supported with respect to a substrate in an X axis direction parallel to a surface of the substrate, a transducer displaceably supported with respect to the main frame in a Y axis direction perpendicular to the X axis direction and parallel to the surface of the substrate, and a plurality of drive electrode portions which are provided on the main frame and drive the main frame in the X axis direction. The main frame includes a terminal portion where an end of the main frame extends in the Y axis direction, and at least one of the plurality of drive electrode portions is arranged on each side in the X axis direction of the terminal portion.
申请公布号 US2007126415(A1) 申请公布日期 2007.06.07
申请号 US20060548043 申请日期 2006.10.10
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 SENDA HIDEMI
分类号 G01P3/42 主分类号 G01P3/42
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