发明名称 LINEAR AND CROSS-LINKED HIGH MOLECULAR WEIGHT POLYSILANES, POLYGERMANES, AND COPOLYMERS THEREOF, COMPOSITIONS CONTAINING THE SAME, AND METHODS OF MAKING AND USING SUCH COMPOUNDS AND COMPOSITIONS
摘要 Methods are disclosed of making linear and cross-linked, HMW (high molecular weight) polysilanes and polygermanes, polyperhydrosilanes and polyperhydrogermanes, functional liquids containing the same, and methods of using the liquids in a range of desirable applications. The silane and germane polymers are generally composed of chains of Si and/or Ge substituted with R' substituents, where each instance of R' is, for example, independently hydrogen, halogen, alkenyl, alkynyl, hydrocarbyl, aromatic hydrocarbyl, heterocyclic aromatic hydrocarbyl, SiR" <SUB>3</SUB>, GeR"<SUB>3</SUB>, PR" <SUB>2</SUB>, OR" , NR" <SUB>2</SUB>, or SR"; where each instance of R is independently hydrogen or hydrocarbyl. The cross-linked polymers can be synthesized by dehalogenative coupling or dehydrocoupling. The linear polymers can be synthesized by ring-opening polymerization. The polymers can be further modified by halogenation and/or reaction with the source of hydride to furnish perhydrosilane and perhydrogermane polymers, which are used in liquid ink formulations. The synthesis allows for tuning of the liquid properties (e.g., viscosity, volatility, and surface tension). The liquids can be used for deposition of films and bodies by spincoating, inkjetting, dropcasting, etc., with or without the use of UV irradiation. The deposited films can be converted into amorphous and polycrystalline silicon or germanium, and silicon or germanium oxide or nitride by curing at 400-600 DEG C and (optionally) laser- or heat-induced crystallization (and/or dopant activation, when dopant is present).
申请公布号 WO2007044429(A3) 申请公布日期 2007.06.07
申请号 WO2006US38878 申请日期 2006.10.05
申请人 DIOUMAEV, VLADIMIR, K. 发明人 DIOUMAEV, VLADIMIR, K.
分类号 H01L21/31;H01L21/469 主分类号 H01L21/31
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