| 摘要 |
An exposure apparatus that irradiates exposure light onto a substrate to expose the substrate, comprises an optical element that has a concave surface from which the exposure light is emitted, a supply port that is provided on an object that can be placed in opposition with the concave surface and that supplies a liquid to the space between the concave surface and the object, and a suction port that is provided on the object and suctions the fluid of the space between the concave surface and the object.
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