PROCESS AND APPARATUS FOR TRAPPING BY-PRODUCT FROM AL-CVD PROCESS

摘要

A method and apparatus for trapping byproduct from Al-CVD process is provided to improve an exhaust efficiency of a vacuum pump and a vacuumizing efficiency of a process chamber by reducing the possibility of depositing aluminum in the vacuum pump. After unreacted byproduct trapped from a process chamber is reacted in a temperature of 20 to 150 deg.C during a predetermined time, the obtained resultant is reacted in a temperature of 150 to 200 deg.C during a predetermined time to crystallize aluminum and thus cohere it to an inner surface of a trap(20). Aluminum and hydrogen gas which do not reacted in the above step are sucked by a vacuum pump(30) heated by a temperature of up to 150 deg.C, and the resultant is outwardly discharged.